The NST-HVMSS-SPC-2 is a 2″ diam. circular magnetron sputtering gun which can accommodate a wide range of sputtering targets, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.
Specification of the magnetron sputtering source:
| Features
|
- Made of high-quality materials of stainless steel and ceramics.
- Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile.
- The magnet is coated with protective material against cooling water corrosion to maximize durability.
- Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
- The low impedance sputtering heads are easily interfaceable with an external power supply.
- Easy to install a standard fitting with included quick connector
- 2″ Copper Backing Plate is included.
- Target replacement is easy and no need to adjust the gun to fit targets with different height.
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| Power Requirement |
- DC (Max.) 1000 W
- RF (Max.) 500 W
|
| Electrical Connection Type |
- Standard HN Female Connector is included
- Optional SL16 cable Connector
- 148 cm RF cable is recommended with extra cost
|
| Sputtering Current (Max.) |
3 Amp |
| Sputtering Voltage |
100-1000 V |
| Sputtering Pressure |
5-100 mTorr |
| Dimensions |
- Anode Shield Diameter: 3.5″
- Total Length: 14″
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| Sputtering Target |
- Diameter: 2.0″ (50.8mm)
- Thickness: up to 1/4″ for non-magnetic target; up to 1/16″ for magnetic target
- Utilization: up to 30%
- Magnet: NdFeB Rare Earth Magnet
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| Cooling Water Requirement |
- Flow Rate: 0.8 GPM
- Water Inlet Temperature: <20 C
- Water tubing: 0.25″ O.D.
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| Mounting |
- Feedthrough: 3/4″ O.D.tube
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| Net Weight |
3.5 lbs |
| Accessories |
- High vacuum Quick connector with 0.75″ ID is included. Use this component to install the sputtering source onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole at easy
- 6″ CF flange with a high vacuum feedthrough is available upon request at extra cost. The sputtering head can be easily installed on the 6” CF vacuum flange through the quick disconnector. The height position of the sputtering gun can be manually adjusted inside the vacuum chamber.
- Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please click picture below right to order.
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| Warranty |
One year limited with lifetime support |
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