NST-12 Ion Sputter Coater

Combinatorial plasma sputtering coater has three 2” magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and create various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery).

NST Four sources thermal evaporating system is a compact thermal evaporating system with total 4 evaporating source crucibles and precision and programmable temperature control. Four evaporating crucibles could be used to deposit multiple different materials to grow multilayers films one by one in the same chamber.

NST Customized 5 heads RF plasma magnetron sputtering coater is capable of a five-element combinatorial coating of up to 16 samples with varying compositions, making it especially good for searching high-performance solid state electrolyte materials, magnetic alloys, and multiferroic materials.