NST 1200℃ Dual Zones Sliding PECVD System
- Model Number:TMAX-1200-1200
- Compliance:CE Certified
- Warranty:Two years limited warranty with lifetime technical support
- Payment:L/C D/A D/P T/T Western Union
- Delivery Time:15 day
₹1.00
Compare1200℃ Dual Zones Sliding PECVD System
TMAX-1200-1200 slip-type two-temperature area PECVD system is composed of TMAX-1200-1200 slip-type two-temperature vacuum tube furnace, quartz vacuum chamber, radio frequency power supply, GX gas supply system, pumping system and vacuum measuring system.
Main features:
1. The gas in quartz vacuum chamber is changed into ionic state by rf power supply.
2. PECVD is lower than normal CVD for chemical vapor deposition
3. The stress of the deposited films can be controlled by the frequency of rf power supply
4. PECVD has high deposition rate, good uniformity, consistency and stability than normal CVD.
5. Widely used in the growth of various films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-si: H), etc.
This slide TL1200-1200 type double temperature PECVD system technique is a rapid heating, cooling temperature PECVD system technique, is in the temperature range of double PECVD system installed on a pair of slide rail, technique available manual sliding system.
Heating and cooling rate of up to 100 ° C/min.
To get the fastest heating, heat the stove to the set temperature beforehand, then move the furnace to the sample position.
To get the fastest cooling, move the stove to the other end after the sample is heated.
Heating and cooling rate under vacuum or inert gas environment can reach 10 ° C/s, is a low cost rapid heating and cooling temperature range of double PECVD system technique.
| model | NST-1200-1200 – I | NST-1200-1200-II | NST-1200-1200-III | NST-1200-1200-IV | |
| power | 3 kw | 3 kw | 4 kw | 4 kw | |
| Tube size | 120 (OD) X1800mm Dia | 60 (OD) X1800mm Dia | 80 (OD) X1800mm Dia | 100 (OD) X1800mm Dia | |
| Overall dimensions(LXDXH) | 1800 x480x680 | 1800 x410x610 | 1800 x410x610 | 1800 x460x660 | |
| The power supply voltage | 220 v | ||||
| Slide rail material | 304 stainless steel | ||||
| Sliding mode | stainless steel rolling bearing | ||||
| Number of phase | Single phase | ||||
| Heating element | Import Swedish Canthal A1 resistance wire click into data download | ||||
| The control mode | Using the yu electric program control thermometer (standard) 1. 30 program control temperature intelligent PID adjustment. 2. The heating circuit of the electric furnace can be automatically cut off when it has been protected by warm or broken accidentally. (when the furnace temperature exceeds 1200 degrees or the thermocouple is broken, The ac relay ON the main circuit will be automatically disconnecting, the main circuit is broken, the light ON the panel is out, OFF the light, the limited protective electric furnace. 3. With 485 communication interface (standard and standard for choosing software) 4. It has the function of power failure protection, that is, when the power is off, the program will not start up from the beginning temperature, but the furnace will start to rise when the power is off. The instrument has the function of temperature self-setting (to replace the imported instrument, we need to pay another fee.)
FP93 temperature control table(SHIMADEN) European instruments Touchscreen instrument |
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| The temperature control mode | PID | ||||
| Broken even protection and display | Yes | ||||
| Over temperature protection | Yes | ||||
| Over current protection | Yes | ||||
| Control precision | + / – 1 ℃ | ||||
| The trigger | Phase shift trigger | ||||
| Electrical appliances | Zhejiang chint | ||||
| Silicon controlled rectifier | 106/16e west gate, Germany | ||||
| The highest temperature | Temperature Zone1: 1200 ℃ temperature zone 2:1200 ℃ | ||||
| The rated temperature | Temperature Zone1: 1100 ℃ temperature zone 2:1100 ℃ | ||||
| Heating rate | The 20 ℃ / Min or less (can modify according to the requirement) | ||||
| Recommended heating rate | 10 ℃ / Min or less | ||||
| Model of thermocouple | Zones 1: temperature range of K type 2: K type | ||||
| Heating length | Zones 1: temperature range of 200 mm. 2:200 mm | ||||
| Electrical certification | CE | ||||
| Surrounding surface temperature | 45 ℃ or less | ||||
| Rf power supply |
(plasma generator) |
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| Power output range | 0-500 w | ||||
| Maximum reflected power | 200 w. | ||||
| Working frequency | Rf: 13.56 MHZ plus or minus 0.005% | ||||
| Power stability | + / – 0.1% | ||||
| Harmonic component | – 50 or less DBC | ||||
| Rf width | 0-600 – mm is adjustable | ||||
| Matching mode | automatic | ||||
| Cooling mode | Air cold | ||||
| noise | The < 50 db | ||||
| The radio frequency interface | 50 Ω N – type | ||||
| Input power | 208-240 – v 50/60 hz | ||||
| Main parameters of GX gas supply system | mass flowmeter The standard range Using the proton flow controller 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range of the range and the type of the gas) Maximum working pressure 3 mp The accuracy of Plus or minus 1.5% The pressure drop < 0.01 mpa < p = “” > Repeat accuracy Plus or minus 0.2% F.S |
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| Channles: | 1, 2, 3, 4, 5, 6, 7, 8 (optional ) | ||||
| Joint type | Double cassette stainless steel connector | ||||
| System work pressure range | 0.1 ~ 0.5 MPa | ||||
| Working temperature | 5-45 ℃ | ||||
| Pressure vacuum watch | 0.1 ~ 0.15 MPa to 0.01 MPa/case | ||||
| Static mixing chamber | Dia50 X 400 mm | ||||
| interface | Dia6 1/4″ | ||||
| The power supply | 220 v | ||||
| size | 600 x600x600 | ||||
| Corrugated pipe | KF25X1000mm | ||||
| The vacuum degree can be reached with this system | 10-1 the pa | ||||
| Vacuum baffle valve | KF25 | ||||
| VRD to 8 vacuum pump | |||||
| model | VRD to 8 | ||||
| Limiting partial pressure | 5 x10-2 Pa | ||||
| Inlet exhaust interface | KF25 | ||||
| Motor speed | 1440 RPM | ||||
| Extraction rate | 2.2 L/S | ||||
| Motor power | 0.4 KW | ||||
| Perfeer ACP1 Oil-free multi-stage roots pump (plan 2) | |||||
| Model | ACP15 | ||||
| Power supply | AC100 ~ 240V 50/60hz | ||||
| Power | 450 w | ||||
| Exhaust interface | KF25 | ||||
| Weight | 25 kg | ||||
| The maximum helium leakage rate is | 5 · 10-8 Pa m3 / s | ||||
| Extreme vacuum degree | 0.02 Torr | ||||
| The extraction rate is | 14 m3 / h | ||||
| model | ZDR – 1 | ||||
| power | 25 w. | ||||
| Vacuum degree measurement range | 0.1-10 5 Pa | ||||
| Resistance silicon | What ZJ had to 52 t | ||||
| Sweden (INFICON) Pirani capacitance vacuum meter (optional) | |||||
| model | PCG554 | ||||
| Input voltage | 24V 1A DC (equipped with 220V transformer) | ||||
| Vacuum gauge interface | KF16 | ||||
| Digital display | Digital display (screen size 20x14mm), whose data display unit is torr | ||||
| Product size | 46mm x 28mm x 126mm (L x W x H) | ||||
| The weight of the | 5 LBS | ||||
| Detection of gas | Various gases can be detected including mixed gases, accurate and repeatable. | ||||
| Whether the anti-corrosion | Corrosion protection | ||||
| The response time | 30 ms or less | ||||
| Measuring range | 3.8 x10-5-1125 Torr. | ||||
| Molecular pump unit (optional) | |||||
| Unit input voltage | 380 v / 220 v | ||||
| Corrugated pipe | KF40X1000 | ||||
| Vacuum baffle valve | KF40 | ||||
| Case size | 600 x600x600 | ||||
| Molecular pump model | FJ620 | ||||
| Input voltage | 380 v | ||||
| Molecular pump inlet flange | DN160 | ||||
| Molecular pump pumping rate L/S (for air) | 600 | ||||
| Molecular pump limit pressure (Pa) | 6 x 10-7 | ||||
| Cooling system | Water cooled | ||||
| Cooling water pressure (MPa) | 0.1 to 0.2 | ||||
| Cooling water temperature | < 25 ℃ < p = “” > | ||||
| The environment temperature | 0 ~ 40 ℃ | ||||
| Suggested starting pressure | < 100 pa < p = “” > | ||||
| Engine vacuum pump RVP – 6 | |||||
| power | 0.75 KW | ||||
| voltage | 380 v | ||||
| speed | 1450 RPM | ||||
| Inlet diameter | KF25 / KF40 | ||||
| Pump pumping rate (L/S) | 6 | ||||
| Ultimate pressure | 4 x10-2 pa | ||||
| German Pfeiffer vacuum pump | |||||
| voltage | 220 v | ||||
| power | 110 w. | ||||
| Extraction interface | KF40 | ||||
| The weight of the | 150 kg | ||||
| Pump speed of the front pump | 0.9 m 3 / h | ||||
| Extraction rate (N2) | 33 m/S | ||||
| Compound vacuum gauge | |||||
| Compound vacuum gauge model | ZDF | ||||
| The power supply | 220 v 55 w | ||||
| Control precision | Plus or minus 1% | ||||
| Vacuum gauge measurement range | 10-5-10 5 Pa | ||||
| Parts | Number |
| TL1200-1200 Tube furnace | 1 set |
| quartz tube | 1 |
| SS Flange | 1 set |
| Stainless steel hook | 1 |
| Alumina furnace plug | 3 |
| High temperature gloves | 1 pair |
| alumina crucible | 1 |
| Ｋ thermocouple | 1 |
| 485 transform interfaces and software（optional） | 1 set |
| Instruction book | 1 |
| Flange support | 1 |
| Gas supply system | 1 |
| VS-0.1air extracting system | 1 |
| RF power | 1 |
| Ferrule | 4个 |
| Bellow | 1 |
| Vacuum baffle valve | 1 |
| Cyl connector（N stands for number of channels） | N |
| Valve connector | 2 |
| PTFE pipe (N stands for number of channels) | N*5 |
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