NST Vacuum Diffusion Pump System
Diffuser pump unit
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Unit input voltage | 380V /220V/110V | |
Bellows | KF40X1000 | ||
Vacuum flapper valve | KF40 | ||
Chassis size | 600X600X600 | ||
Diffusion pump
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Diffusion pump Model | TK150 | |
Inlet diameter | 150mm | ||
Pumping speed rate L/S (for air) | 1000L | ||
Recommended starting pressure | <10 Pa | ||
Ultimate pressure (Pa) | 7×10-5 | ||
Exhaust port flange | KF40 | ||
Power Rate | 1.2KW | ||
Input voltage frequency (V/Hz) | 22OV | ||
Ambient temperature (°C) | 0~40 | ||
Fore line pump model | FX-16 | ||
cooling method | Water cooling | ||
Cooling water temperature (°C) | <25 | ||
Installation method | Vertical | ||
Oil filling | 0.3L | ||
Weight (kg) | 40 | ||
Product number | FFX-16 | ||
Diffusion pump pre-stage vacuum pump FFX-16
(The diffusion pump must be equipped with a pre-stage pump)
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Power Rate | 0.75KW | |
Voltage | 380V | ||
Rotating speed | 1450rpm | ||
Air intake diameter | KF25/KF40 | ||
Fore line pumping rate (L/S) | 4 | ||
Ultimate pressure | 4X10 -2Pa | ||
Composite vacuum gauge
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Composite vacuum gauge Model | ZDF | |
Voltage | 220V 55W | ||
Control accuracy | ± 1% | ||
Vacuum gauge measurement range | 10-5 -10 5 Pa |
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