Pumping Pump: | 62L/s N2 | Backing Pump: | GHD-031B (oil Pump) KNF 813.3 ANF (dry Pump) |
---|---|---|---|
Ultimate Pressure: | 3×10-5(ISO-K);5×10-6(CF) | Recommended Fore-vacuum Pressure: | 50Pa |
High Light: |
vacuum pumping station |
Configuration:
Frame | Portable unit |
Molecular pump | FF-63/80 |
Molecular pump control module |
TC-100 |
Backing pump | GHD-031B (oil pump) KNF 813.3 ANF (dry pump) |
Vacuum gauge | WPC400 (external, optional) |
Electromagnetic block valve | AirTAC |
Transition chamber | DN63/CF35/KF40 ( customizable) |
Other attachments | Corrugated pipe, hoop, bolts, block valve, oxygen-free copper sealing ring, etc |
Specifications:
Model | Unit | NST-80 |
Flange(In) | DN63 ISO-K | |
DN63 CF | ||
Flange(Out) | ISO-KF | DN16 |
Pumping Speed | l/s | N2:62 |
He:55 | ||
H2:34 | ||
Ar:65 | ||
Compression Ratio | N2: 109 | |
He: 105 | ||
H2:104 | ||
Ar:109 | ||
ultimate Pressure | Pa | 3×10-5(ISO-K);5×10-6(CF) |
Recommended fore-vacuum pressure | Pa | <50 |
forevacuum pump | GHD-031B①(standard) | |
Cooling type,Standard | Air | |
Cooling Water Consumption | L/min | >1 |
Cooling Water Temperature | ℃ | ≤25 |
Input voltage / frequency | V/Hz | 220±20/50 |
environment temperature | ℃ | 5-40 |
mounting position | Vertical | |
Controller Model | ||
L*W*H | mm | 400×300×260 |
Weight | kg | 16-21 |
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