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‘NST’ Series Vacuum Plasma Surface Treatment Equipment


 8,000,000.00  8,500,000.00

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Product Introduction

‘NST’ VACUUM PLASMA TREATMENT EQUIPMENT IS SUITABLE FOR PRODUCT SURFACE PURIFICATION, ACTIVATION, COARSENING, ETCHING AND GRAFTING, AND CAN BE USED TO TREAT A VARIETY OF MATERIALS, INCLUDING METALS, SEMICONDUCTORS, POLYMERS, COMPOSITES, CERAMICS AND GLASS.

 

FEATURES:

1 Environmental technologies: plasma process is the role of gas – solid coherent reactor, consumes no water resources, no need to add chemicals and no environmental pollution.
2 Wide adaptability: regardless of processing substrate type, such as metals, Semiconductors, oxides, and most of the polymer material can be a good deal.
3 Low temperature: close to room temperature, particularly suitable polymer materials, have a longer retention time and a higher surface tension than the corona and flame method.
4 Multifunction: it involves only a shallow surface of polymer materials (10 -1000A), while preserving the characteristics of the material itself can give it one or more new features.
5 Low cost: the device is simple, easy in operation and maintenance free, continuous operation, a few bottles of gas can replace thousands of kilograms cleaning fluid.
6 The whole process technology can be controlled all the parameters can be set on the touch screen and data recording.
7 Treated geometry Unlimited: Big or small, simple or complex, parts or textiles can be processed.

ADVANTAGES

PLC control system;

Suitable for 3D work pieces with complex structure;

Does not change the inherent characteristics of the body, the modification only occurs on the surface;

Whole process dry treatment, no pollution;

Low temperature treatment, suitable for heat sensitive materials; High stability, long service life;

Low energy consumption, low maintenance costs.

 

PRODUCT APPLICATION

 

                          Semiconductor
                                 Optical glass

 

                              Biomedical
                            Mobile phone industry

 

Product parameter

SUPPLY AND DEMAND

POWER SUPPLY: 380V/50HZ, THREE-PHASE, 15A;

PROCESS GAS: INPUT PRESSURE 0.2MPA;

COMPRESSED AIR: INPUT PRESSURE 0.6MPA

OPTIONAL CONFIGURATION

RF GENERATOR; CIRCULATING WATER COOLER;

VACUUM CHAMBER SIZE (CUSTOMIZABLE);

MFC RESISTANT TO CORROSIVE GASES.

Technical configuration NST-80 NST-110 NST-150
Overall Dimension 1050×1020×1750mm
Reaction cavity size (WxHxD) 450 × 400 × 450 mm 400 x 400 x 600 mm 530 x520 x 560 mm
Effective size of bracket 320x400mm 380×480mm 480×390 mm
Vacuum chamber material Stainless Steel (SS-316)
Formation Flat horizontal trays/ vertical trays/ rotary drum
Vacuum pump Bipolar oil pump
Pumping Speed 40 m3/hr
Flapper valve Ultra-high vacuum KF40
Mass flow controller 0-500 Sccm (optional)

Resolution: 0.1% of full scale,

Repeatability: +/-0.3% of reading

Leak rate: <0.1% of full scale

Vacuum gauge ULVAC
Radio frequency power supply 40KHz/ 13.56 MHZ (optional)
Power 0-1000W, continuously variable output
PLC system Siemens
Electrical system Schneider
Touch screen 10.7 inch
Water cooling system Assorting
Treatment gas O2 、Ar 、N2 、 H2、 CF4、CDA
Gas connection 6 mm inlet

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