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Small two-in-one coating machine NST-EVS180G-LV


The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.

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Technical Parameter

NST  the plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation. The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose.

Small two-in-one coating machine applications:

Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode.

Small two-in-one coating machine technical parameters:

Small two-in-one coating machine
Sample Stage Size φ80mm Distance to the evaporation   source 20mm~50mm adjustable
DC sputtering head Number 2”×1
Evaporation system Evaporation source Tungsten wire basket Max Temperature 1700℃
Thermal couple S type thermocouple
Vacuum Chamber Chamber Size φ180mm×150mm Watch Window Omnidirectional transparency
Chamber Material High purity quartz Opening mode Top cover removable
Vacuum System Mechanical Pump Rotary vane pump Pumping connector KF16
vacuum measurement Resistance gauge Exhaust connector KF16
Ultimate vacuum 1.0E-1Pa Power Supply AC;220V 50/60Hz
Pumping rate Rotary vane pump:1.1L/S
Sputter Power Configuration Number DC power supply x1 Max Power Output 150w
 Other Supply Voltage AC220V,50Hz Overall size 360mm×300mm×470mm
Total power 1.5kw Total Weight 20kg

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SKU: 854613298-1-1-1-1-1-2-1-2-1-1-1-1-1-1-1-1-1-1-1-1-1-1-1-1 Categories: ,
Weight 12 kg
Dimensions 12 × 12 × 16 mm

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