Single target NST magnetron sputtering coater NST-MSP300S-DC

Single target NST magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. The magnetron target head can be selected from 1 inch 2 inches 3 inches. Customers can choose the target according to the size of the substrate to be coated.




Single target NST magnetron sputtering coater is equipped with 1500W high power NST power supply, which can be used for high energy metal sputter coating. Other specifications of NST or NST power supply can be selected to achieve coating operation of various materials.

The coating machine has a two-channel high precision mass flow meter. If customers have other requirements, the gas path of up to four-channel mass flow meter can be customized to meet the complex gas environment requirements. The instrument is equipped with advanced turbo molecular pump group, and ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.

Single target NST magnetron sputtering coater application:

This device can be used for preparing single-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the single target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Single target NST magnetron sputtering coater technical parameters:

Sample stage Size φ185mm Temperature   control accuracy ±1℃
Heating temperature Max 500℃ Rotate speed 1-20rpm adjustable
Magnetron Sputtering target head Quantity 2”×1 (1”,2”,3”, 4”optional) Water chiller Circulating water chiller with flow rate of 10L/min
Cooling mode Water cooling
Vacuum chamber Chamber size φ300mm×300mm Watch window φ100mm
Chamber material Stainless steel Opening mode Top cover open
Mass flowmeter 2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)
Vacuum system Model NST-GZK103-A Pumping interface KF40
Molecular pump NST-600 Exhaust interface KF16
Backing pump rotary vane pump Vacuum measurement Compound vacuum gauge
Ultimate vacuum 1.0E-5Pa Power supply AC;220V 50/60Hz
Pumping rate Molecular pump: 600L/S    rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20   minutes
Power   configuration Quantity NST   power supply×1 Max  output power 1500W
Other   parameters Supply   voltage AC220V,50Hz Overall  size 600mm×650mm×1280mm
Total power 3KW Total Weight 300kg

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