NST-12 Ion Sputter Coater

NST Two in one film coater is a compact coating unit with double step rotary vane vacuum pump, which integrates plasma sputtering and evaporating into one small machine.It is specially designed for preparing SEM and EDAX sample for microstructure and micro-area composition analysis in material analysis at low cost. to coat various materials, including carbon.

High vacuum magnetron sputtering coater is mainly composed of sputtering vacuum chamber, magnetron sputtering target, substrate water-cooled heating revolution table, working gas path, pumping system, installation machine, vacuum measurement and electronic control system.

NST-in-line magnetron sputtering system is used to deposit metal film (Al, Ag, Ni, Cu, Ti, Pd, etc.) on the surface of crystal silicon, and can realize reactive sputtering. It can complete magnetron sputtering process under high and low vacuum, and also has the ability to produce crystalline silicon photovoltaic film in various sizes and larg.