NST 1200℃ Dual Zones Sliding CVD Furnace
- Model Number:TMAX-1200-1200-C
- Compliance:CE Certified
- Warranty:Two years limited warranty with lifetime technical support
- Payment:L/C D/A D/P T/T Western Union
- Delivery Time:15 day
₹1.00
CompareNST 1200℃ Dual Zones Sliding CVD Furnace
This is a video link to our product.
https://www.youtube.com/watch?v=FzLjvMXq1pY&t=37s
The gas-phase deposition system of NST-1200-1200-C is composed of sliding tube type furnace, quartz vacuum chamber, GX gas supply system, extraction system, vacuum measurement system and ALD system.
The NST-1200-1200-C atomic layer vapor deposition system with Kanthal A1 resistance wire heating element, using double shell structure and 30 program temperature control table, zero passage trigger, thyristor control, furnace using polycrystalline alumina fiber material, can stainless steel flange seal on both ends of the furnace tube, stainless steel flange installation have a mouth, valve and pressure gauge, vacuum, vacuum degree can reach 10-3 Pa, low temperature field balancing, surface temperature, lift temperature rate, energy saving, price concessions, etc.
Open cover protection system: the furnace is equipped with a travel switch. When the cover is opened, it will automatically cut off the power and ensure the user’s safety.
1. Kanthal A1 resistance wire of Sweden
(1), high surface temperature can reach 1420 ℃
(2) the surface is stainless steel (very bright, the customer should pay attention to it), it will not rust, and the use time will not fall off the slag.
(3) data of Kanthal resistance wire is downloaded
(4) Kanthal resistance wire website: www.kanthal.com
(5) the resistance is balanced and the temperature field is equally good.
2. Installation of air switch and leakage protector:
When an electric current or leakage, an empty meeting automatically disconnects.
3. Can connect with computer
This furnace is equipped with communication interface and software, can be directly through the furnace computer control of each parameter, and can be observed from the computer PV on the stove and SV temperature value and instrument operation, the actual temperature of the furnace curve drawing computer real time, and can keep the temperature data of each time, can call up at any time.
(1) High quality high pure alumina polycrystalline fiber cured furnace with vacuum suction and filter molding.
(2). Adopt Japanese technology to form.
(3). The spacing and pitch of the resistance wire in the furnace are arranged according to the best thermal technology of Japan, and the temperature field is simulated by thermal software
(4). Using 4 weeks heating, the temperature is more balanced.
| model | TMAX-1200-1200-C-I | TMAX-1200-1200-C-II | TMAX-1200-1200-C-Ⅲ | |
| power | 3 kw | 3 kw | 4 kw | |
| Tube size | 60 (OD) X1800mm Dia | 80 (OD) X1800mm Dia | 100 (OD) X1800mm Dia | |
| Overall dimensions(LXDXH) | 1500X450X600 | 1500X450X600 | 1500X510X650 | |
| The power supply voltage | 220 v | |||
| Sliding mode | stainless steel rolling bearing | |||
| Number of phase | Single phase | |||
| Heating element | Import Swedish Canthal A1 resistance wire click into data download | |||
| The control mode | Using the yu electric program control thermometer (standard) 1. 30 program control temperature intelligent PID adjustment. 2. The heating circuit of the electric furnace can be automatically cut off when it has been protected by warm or broken accidentally. (when the furnace temperature exceeds 1200 degrees or the thermocouple is broken, The ac relay ON the main circuit will be automatically disconnecting, the main circuit is broken, the light ON the panel is out, OFF the light, the limited protective electric furnace. 3. With 485 communication interface (standard and standard for choosing software) 4. It has the function of power failure protection, that is, when the power is off, the program will not start up from the beginning temperature, but the furnace will start to rise when the power is off. The instrument has the function of temperature self-setting (to replace the imported instrument, we need to pay another fee.)
FP93 temperature control table(SHIMADEN) European instruments Touchscreen instrument |
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| The temperature control mode | PID | |||
| Broken even protection and display | Yes | |||
| Over temperature protection | Yes | |||
| Over current protection | Yes | |||
| Control precision | + / – 1 ℃ | |||
| The trigger | Phase shift trigger | |||
| Electrical appliances | Zhejiang chint | |||
| Silicon controlled rectifier | 106/16e west gate, Germany | |||
| The highest temperature | Temperature Zone1: 1200 ℃ temperature zone 2:1200 ℃ | |||
| The rated temperature | Temperature Zone1: 1100 ℃ temperature zone 2:1100 ℃ | |||
| Heating rate | The 20 ℃ / Min or less (can modify according to the requirement) | |||
| Recommended heating rate | 10 ℃ / Min or less | |||
| Model of thermocouple | Zones 1: temperature range of K type 2: K type | |||
| Heating length | Zones 1: temperature range of 200 mm. 2:200 mm | |||
| Electrical certification | CE | |||
| Surrounding surface temperature | 45 ℃ or less | |||
| Rf power supply | (plasma generator) | |||
| Main parameters of GX gas supply system | mass flowmeter The standard range Using the proton flow controller 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM (you can choose the range of the range and the type of the gas) Maximum working pressure 3 mp The accuracy of Plus or minus 1.5% The pressure drop < 0.01 mpa < p = “” > Repeat accuracy Plus or minus 0.2% F.S |
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| Channles: | 1, 2, 3, 4, 5, 6, 7, 8 (optional ) | |||
| Joint type | Double cassette stainless steel connector | |||
| System work pressure range | 0.1 ~ 0.5 MPa | |||
| Working temperature | 5-45 ℃ | |||
| Pressure vacuum watch | 0.1 ~ 0.15 MPa to 0.01 MPa/case | |||
| Static mixing chamber | Dia50 X 400 mm | |||
| interface | Dia6 1/4″ | |||
| The power supply | 220 v | |||
| size | 600 x600x600 | |||
| Corrugated pipe | KF25X1000mm | |||
| The vacuum degree can be reached with this system | 10-1 the pa | |||
| Vacuum baffle valve | KF25 | |||
| VRD to 8 vacuum pump | ||||
| model | VRD to 8 | |||
| Limiting partial pressure | 5 x10-2 Pa | |||
| Inlet exhaust interface | KF25 | |||
| Motor speed | 1440 RPM | |||
| Extraction rate | 2.2 L/S | |||
| Motor power | 0.4 KW | |||
| Perfeer ACP1 Oil-free multi-stage roots pump (plan 2) | ||||
| Model | ACP15 | |||
| Power supply | AC100 ~ 240V 50/60hz | |||
| Power | 450 w | |||
| Exhaust interface | KF25 | |||
| Weight | 25 kg | |||
| The maximum helium leakage rate is | 5 · 10-8 Pa m3 / s | |||
| Extreme vacuum degree | 0.02 Torr | |||
| The extraction rate is | 14 m3 / h | |||
| model | ZDR – 1 | |||
| power | 25 w. | |||
| Vacuum degree measurement range | 0.1-10 5 Pa | |||
| Resistance silicon | What ZJ had to 52 t | |||
| Sweden (INFICON) Pirani capacitance vacuum meter (optional) | ||||
| model | PCG554 | |||
| Input voltage | 24V 1A DC (equipped with 220V transformer) | |||
| Vacuum gauge interface | KF16 | |||
| Digital display | Digital display (screen size 20x14mm), whose data display unit is torr | |||
| Product size | 46mm x 28mm x 126mm (L x W x H) | |||
| The weight of the | 5 LBS | |||
| Detection of gas | Various gases can be detected including mixed gases, accurate and repeatable. | |||
| Whether the anti-corrosion | Corrosion protection | |||
| The response time | 30 ms or less | |||
| Measuring range | 3.8 x10-5-1125 Torr. | |||
| Molecular pump unit (optional) | ||||
| Unit input voltage | 380 v / 220 v | |||
| Corrugated pipe | KF40X1000 | |||
| Vacuum baffle valve | KF40 | |||
| Case size | 600 x600x600 | |||
| Molecular pump | ||||
| Molecular pump model | FJ620 | |||
| Input voltage | 380 v | |||
| Molecular pump inlet flange | DN160 | |||
| Molecular pump pumping rate L/S (for air) | 600 | |||
| Molecular pump limit pressure (Pa) | 6 x 10-7 | |||
| Cooling system | Water cooled | |||
| Cooling water pressure (MPa) | 0.1 to 0.2 | |||
| Cooling water temperature | < 25 ℃ < p = “” > | |||
| The environment temperature | 0 ~ 40 ℃ | |||
| Suggested starting pressure | < 100 pa < p = “” > | |||
| Engine vacuum pump RVP – 6 | ||||
| power | 0.75 KW | |||
| voltage | 380 v | |||
| speed | 1450 RPM | |||
| Inlet diameter | KF25 / KF40 | |||
| Pump pumping rate (L/S) | 6 | |||
| Ultimate pressure | 4 x10-2 pa | |||
| German Pfeiffer vacuum pump | ||||
| voltage | 220 v | |||
| power | 110 w. | |||
| Extraction interface | KF40 | |||
| The weight of the | 150 kg | |||
| Pump speed of the front pump | 0.9 m 3 / h | |||
| Extraction rate (N2) | 33 m/S | |||
| Compound vacuum gauge | ||||
| Compound vacuum gauge model | ZDF | |||
| The power supply | 220 v 55 w | |||
| Control precision | Plus or minus 1% | |||
| Vacuum gauge measurement range | 10-5-10 5 Pa | |||
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