NST 1200C Three Zones CVD Tube Furnace with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station
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The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.
| tube furnace
||Casing||Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.
|Processing Tube||Material: Fused quartz tube|
Thermal Block Placement
|Rated Voltage||AC 208-240V Single phase, 50/60Hz|
|Heating Element||Fe-Cr-Al Alloy doped by Mo|
|Working Temp.||Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
|Heat-up Rate||Heat-up rate: 1~20°C/min programmable|
|Heating Zone Length||Total heating zone: 900mm (300mm + 300mm + 300mm)|
|Vacuum Seal||One pair of stainless steel vacuum flange with:
– one mechanical pressure gauge
– two needle valves
– one KF-40 connector for the high vacuum station.
|Rated Voltage||AC 208-240V Single Phase, 50/60Hz|
|Dimension||1100(L) x 450(W) x 670(H), mm|
|High Vacuum Station||Structure||Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Inside: Pfeiffer vacuum pump made in Germany
Vacuum sensor is included
|Volume Flow Rate||Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
|Working Range||From 1000 mbar to <1E-7 mbar|
|Ultimate Pressure||<1E-8 mbar (without any leaking )|
|Voltage & Power||110VAC or 220VAC, 110W|
|Mass Flow Gas Control
|Rated Voltage||AC 208-240V, Single phase, 50/60Hz|
Shipping & Warranty
|Shipping Dimension||Total Three Pallets （ #1: 60″ x 45″ x 40″ #2: 48″ x 40″ x 42″ #3: 48″ x 40″ x 42″ ）|
|Shipping Weight||850 lbs|
|Warranty||One year limited warranty
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty,
please order the replacement at related products below.)