NST 1200C Three Zones CVD Tube Furnace

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  • Model Number:TMAX-3-1200
  • Dimension(L*W*H):1100(L) x 450(W) x 670(H), mm
  • Compliance:CE Certified
  • Warranty:Two years limited warranty with lifetime technical support
  • Payment:L/C D/A D/P T/T Western Union
  • Delivery Time:15 day

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TECHNICAL PARAMETER

NST 1200C Three Zones CVD Tube Furnace with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station

This is a video link to our product.

https://www.youtube.com/watch?v=FzLjvMXq1pY&t=37s

The TMAX-3-1200 series furnace workstation consists of three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

 tube furnace


 Casing Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube Material: Fused quartz tube

Thermal Block Placement
Power 7KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp. Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 900mm   (300mm + 300mm + 300mm)
Temp. Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace
Vacuum Seal One pair of stainless steel vacuum flange with:
– one mechanical pressure gauge
– two needle valves 
– one KF-40 connector for the high vacuum station.
Rated Voltage AC 208-240V Single Phase, 50/60Hz
Dimension 1100(L) x 450(W) x 670(H), mm
High Vacuum Station Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Volume Flow Rate Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Voltage & Power 110VAC or 220VAC, 110W
Mass Flow Gas Control Structure
  • 2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software
  • LED display
  • 4 channel MFC Made of 316 stainless steel with gas flow range as below:
    • Controller 1: 0~100SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
  • 4 Channel gas go through a Gas mixing tank: Φ80X120mm
  • Dimension: 600(L) x 745(W) x 700(H), mm
Power 18W
Rated Voltage AC 208-240V, Single phase, 50/60Hz

Shipping & Warranty

Shipping Dimension Total Three Pallets   （ #1: 60″ x 45″ x 40″    #2: 48″ x 40″ x 42″  #3: 48″ x 40″ x 42″ ）
Shipping Weight 850 lbs
Warranty One year limited warranty 
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, 
please order the replacement at related products below.)
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks
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