1500°C Max Tube Furnace (50mm OD) with Sliding Flanges for Fast Heating/Cooling
TMAX-1500X-RTP50 is a CE certified slideable tube furnace that utilizes 50 mm OD x 44mm ID x304.8 mm (12″) L mullite or quartz tubes (one end closed). The maximum working temperature of this furnace is 1500ºC. A sliding rail is installed on right side of the flange for manually moving it from one side to the other, which allows it to achieve fast heating and cooling up to 1500 oC. For the fastest heating, you can insert a mullite processing tube into the pre-heated furnace at the desired temperature. For the fast cooling, you can remove the tube from the hot furnace chamber and use forced air cooling. The heating and cooling rates can be much higher under vacuum or inert gasses. It is an ideal furnace for rapid thermal processing at the lowest cost.
which can move processing tube in & out easily.
10E-3 torr by a mechanical pump. The flange has a 1/4″
Dia. the thermal couple built in for monitoring real-time
temperature inside the tube.
|Power||2.5KW ( 20A breaker required)|
|Voltage||AC 208-240V Single Phase, 50/60 Hz|
|Max. Temperature||1500 oC|
|Continuous Temperature||1400 oC|
|Temperature Accuracy||+/ – 1 °C|
|Heating Zone Length||6″ (152 mm)|
|Constant Temperature Zone||100 mm (+/-1oC) @ 800 – 1500 oC|
|Heating Elements||SiC rod (1500C grade) , 4 pcs|
|Thermocouples||Two S type thermal couples are included. One S type 5″
Length is built in furnace to control furnace temperature
And another S type 14″ inserted inside tube to monitor sample
real temperature profile (below right)
programmable segments are built in. One control furnace temperature
and another monitor temperature of the sample inside processing tube.
for operation without an attendant.
|Heating & Cooling Rate
Temp vs Time curve
Temp Vs Time curve
|Processing Tube Size
(one mullite tube and one quartz tube are included in the standard package)
Warning: Processing tube is consumable and easy to broken
during RTP, not covered by warranty. Pls click pic above to order spare
|Vacuum Seal & Digital Vacuum Gauge||
thermal couple is included
digital vacuum gauge with a wide range between 3.8×10-5
to 1125 Torr. Aside from greater measurement precision,
this gauge reduces risks of chamber explosions caused
by the incorrect reading of gas pressures due to gas-type
|Dimensions||400L x 305W x 530H mm (15.7″ x 12″ x 21″)|
|Net Weight||~ 45 Kg|
|Shipping Package Size||47″x31″x40″|
|Shipping Weight||150 lbs|
|Warranty||One year limited manufacturer’s warranty with lifetime support
(Consumable parts such as furnace liner, processing tubes,
heating elements, and O-rings are not covered by the warranty,
please order replacements at related products below.)
|Laptop, software & WiFi Control (Optional)||
Labview Based Temperature Control System enables
recipe, record and plot data for MTI furnaces.
cost (up to $1,000). Please contact us for more information.
additional charges will apply
out of the chamber meanwhile, preheat the chamber to
the required temperature. Then insert the tube into the
chamber to get fast heat. Please watch the demo video
below to see how this is done.
3 PSI.Vacuum limit definition for all mullite tube
furnaces: * Vacuum pressures may only be safely used up
installed on the gas cylinder to limit the pressure to
below 3 PSI for safe operation.
closed and a positive pressure condition exists within the
furnace chamber. The pressure gauge must be used to
closely monitor the chamber condition at all times during
the heating process; please open the gas release valve
immediately once the chamber pressure has reached over
3 PSI to prevent unforeseeable damages.
( or 200ml/min )
part. We strongly recommend user keep spare tubes in
order to ensure the continuity of operation. The tube is
not covered by Warranty. Use the link to order more.
suit & gloves, if you intend to retract the tube from
the heating chamber.
DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!
|Application note||You may modify the RTP furnace into a small RTE
( rapid thermal evaporation ) or HPCV ( hybrid physical & chemical
vapor deposition ) by DIY.
|Attention Notes||Performance degradation (i.e. furnace can not reach the maximum
temperature 1500°C or it is drawing a higher than normal
working current) can be expected due to the use of aged
SiC heating elements. It is necessary to replace all the heating
elements if the above symptoms were seen.