NST Desktop Magnetron Plasma Sputtering Coater Machine With Vacuum Pump
Introduction of desktop sputter coater
TMAX- Sputtering1 is a compact plasma sputtering coater designed for making metallic coatings, such as gold,
platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering
coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold
sputtering target (gold cathode), Vacuum pump, stainless steel bellows and quick clamps.
desktop sputter coater
Technical Parameters of desktop sputter coater
Input Power | 208V – 240V, 50/60 Hz, < 1000W (including pump)
110V power is available by using a 1000W transformer (15A fuse). The transformer is sold separately. |
Specimen Chamber | Fused glass tube, 100 mm Dia. x 130mm Height
Stainless steel flange |
Specimen Stage | 40mm Dia.
Height of the stage is adjustable |
Vacuum Accessories
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The followings are included:
156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap ( Max vacuum 10e-2 torr) Stainless steel bellows with KF16 adapter and quick clamps Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination One High purity Au target (57mm dia.x0.12mm, 4N) Optional: you may use a turbo pump to achieve 10E-5 torr vacuum by a turbo pump
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Gas Atmosphere | One needle valve installed to allow Ar gas flow to achieve better plasma coating. |
Targets | 4N purity Gold foil: 57 mm Dia. x 0.12 mm ( Included and pre-installed on coater ) |
Overall Dimensions | L 480mm x W 320mm x H 150mm |
Shipping Weight | 120 Lbs with 40″x31″x22″ dimension with crating. |
Net Weight | 20 kg |
Compliance | CE approval |
Warranty | One year limited warranty with lifetime support |
Application Notes | shares the most state-of-art sputter coating technology with our customer,
For the best film strength, please use plasma cleaner to clean sample surface before coating The system requires an Ar gas tank with pressure regulator which is not included sputtering head connects to high voltage. The operator must wear electric insulation gloves during operation. The sputtering coater can be placed into an Ar and N2 gas glove box for coating This model is not suitable for coating light metallic material such as Al, Mg and Zinc or Carbon target due to low energy. Please consider our Magnetron-sputtering coater or Carbon Evaporation Coating. |
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