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60 Liter Chamber ‘NST’ Vacuum Plasma Surface Treatment Equipment (NST-60D)

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Product Introduction

‘NST’ VACUUM PLASMA TREATMENT EQUIPMENT IS SUITABLE FOR PRODUCT SURFACE PURIFICATION, ACTIVATION, COARSENING, ETCHING AND GRAFTING, AND CAN BE USED TO TREAT A VARIETY OF MATERIALS, INCLUDING METALS, SEMICONDUCTORS, POLYMERS, COMPOSITES, CERAMICS AND GLASS.

 

FEATURES:

1 Environmental technologies: plasma process is the role of gas – solid coherent reactor, consumes no water resources, no need to add chemicals and no environmental pollution.
2 Wide adaptability: regardless of processing substrate type, such as metals, Semiconductors, oxides, and most of the polymer material can be a good deal.
3 Low temperature: close to room temperature, particularly suitable polymer materials, have a longer retention time and a higher surface tension than the corona and flame method.
4 Multifunction: it involves only a shallow surface of polymer materials (10 -1000A), while preserving the characteristics of the material itself can give it one or more new features.
5 Low cost: the device is simple, easy in operation and maintenance free, continuous operation, a few bottles of gas can replace thousands of kilograms cleaning fluid.
6 The whole process technology can be controlled all the parameters can be set on the touch screen and data recording.
7 Treated geometry Unlimited: Big or small, simple or complex, parts or textiles can be processed.

ADVANTAGES

PLC control system;

Suitable for 3D work pieces with complex structure;

Does not change the inherent characteristics of the body, the modification only occurs on the surface;

Whole process dry treatment, no pollution;

Low temperature treatment, suitable for heat sensitive materials; High stability, long service life;

Low energy consumption, low maintenance costs.

 

PRODUCT APPLICATION

 

                          Semiconductor
                                 Optical glass

 

                              Biomedical
                            Mobile phone industry

 

Product parameter

SUPPLY AND DEMAND

POWER SUPPLY: 380V/50HZ, THREE-PHASE, 15A;

PROCESS GAS: INPUT PRESSURE 0.2MPA;

COMPRESSED AIR: INPUT PRESSURE 0.6MPA

OPTIONAL CONFIGURATION

RF GENERATOR; CIRCULATING WATER COOLER;

VACUUM CHAMBER SIZE (CUSTOMIZABLE);

MFC RESISTANT TO CORROSIVE GASES.

Model NST-20D NST-35D NST-60D NST-100D NST-300D
Spec. Machine dimension (mm) 650*800*1750 650*800*1750 750*800*1750 750*800*1750 1500*1300*1750
Weight (KG) 200 220 260 260 560
Plasma Chamber Chamber dimension (mm) 260*260*300 300*300*400 400*400*400 400*500*500 700*600*800
Capacity (L) 20 35 60 100 300
Chamber Material Stainless Steel / Aviation Aluminum
Plasma power High frequence (40KHz) 500W 500W 1000W 1500W 5KW / 10KW
Radio Frequency (13.56MHz) 300W 300W 500W 500W / 1000W 2000W
 

Control system

Working mode Manual / automatic
Control mode PLC+HMI
Touch screen 10” 14”
 

 

 

Gas system

Gas channel 2-4 ways
Flow range 0-200sccm / 0-500sccm option
Flow meter 2-4pcs mass flow Controller (MFC)
Gas interface Hose (6mm outer diameter)
Gas pressure 0.1-0.2MPa
Process gas Oxygen, nitrogen, argon, hydrogen or mixed gas, etc.
 

Pallet

Size (mm) 225*255 265*355 365*355 365*455 665*750
Number of layers 2-4 layer 2-4 layer 3-6 layer 3-7 layer 6-10 layer
Material 304 stainless steel (sandblasting + electropolishing)
 

Vacuum system

Pumping speed 16m3/h 30m3/h 60+280m3/h
Ultimate vacuum degree below 10Pa
Vacuum pump Oil pump / dry pump (origin and brand optional)
Range (pa) 1×10-2-1×105
Chamber Volume

100 Litre, 150 Litre, 80 Litre

Frequency

,

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