NST-12 Ion Sputter Coater

The NST-300-2HD dual target magnetron sputtering coater is equipped with two target guns, one weak magnetic target is used for sputter coating of non-conductive materials and one strong magnetic target is used for sputter coating of ferromagnetic materials.

Two zones CSS furnace with rotating wafer holder is an advanced rapid thermal processing furnace with 11″ OD quartz chamber and 5″×5″ rotating sample holder. It is designed for CSS (Close Spaced Sublimation) film coating up to 5″ circular or square wafer samples at working temperature of 800°C Max.

NST-3″ two zones CSS furnace is a two heating zone rapid thermal processing  furnace with 11″ O.D quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3″ diameter or 2″×2″ square.