NST the small plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design. The plasma sputtering target is a standard size of 2 inches. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of precious metals such as gold, silver and copper. It is often used in the preparation of conductive films for laboratory scanning electron microscope samples. It is also called “gold spraying machine”. This film coater is equipped with a gas connection for the introduction of protective gas. If the customer needs to pass the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs.
This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, the technician can contact the technician to select the molecular pump group to form a high vacuum system.
Small plasma sputtering coater application:
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
Small plasma sputtering coater technical parameters:
|Sample stage||Size||Φ60mm||Distance to the sputtering target||20mm~35mm adjustable|
|DC sputtering target head||Quantity||2”×1|
|Vacuum chamber||Chamber size||φ180mm×100mm||Watch window||Omnidirectional transparent|
|Chamber material||High purity quartz||Opening mode||Top cover removable|
|Vacuum system||Mechanical pump||Rotary vane pump||Pumping interface||KF16|
|Vacuum measurement||Resistance gauge||Exhaust interface||KF16|
|Ultimate vacuum||1.0E-1Pa||Power supply||AC 220V 50/60Hz|
|Pumping rate||rotary vane vacuum pump: 1.1L/S|
|Power configuration||Quantity||DC power supply×1||Max output power||150W|
|Other parameters||Supply voltage||AC220V,50Hz||Overall size||360mm×300mm×470mm|
|Total power||800W||Total Weight||30kg|
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