NST-12 Ion Sputter Coater

NST-Ultra-High vacuum thermal evaporation coater is designed for coating oxygen sensitive metallic materials, such as Ti, Al, and Ir etc. It also can be used for coating all kinds of materials.  It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.

High vacuum magnetron sputtering coater is mainly composed of sputtering vacuum chamber, magnetron sputtering target, substrate water-cooled heating revolution table, working gas path, pumping system, installation machine, vacuum measurement and electronic control system.

NST-in-line magnetron sputtering system is used to deposit metal film (Al, Ag, Ni, Cu, Ti, Pd, etc.) on the surface of crystal silicon, and can realize reactive sputtering. It can complete magnetron sputtering process under high and low vacuum, and also has the ability to produce crystalline silicon photovoltaic film in various sizes and larg.