NST 3 Temperature Zone 150 Mm OD PECVD Furnace

3 Temperature Zone 150 mm OD PECVD Furnace

TMAX-1200-1200-1200 system is composed of TL1200 vacuum tube furnace, quartz vacuum chamber, rf power supply, GX gas supply system, pumping system and vacuum measurement system.

Main features:

1. The gas in quartz vacuum chamber is changed into ionic state by rf power supply.
2. PECVD is lower than normal CVD for chemical vapor deposition.
3. The stress of the deposited films can be controlled by the frequency of rf power supply.
4. PECVD has high deposition rate, good uniformity, consistency and stability than normal CVD.
5. Widely used in the growth of various films, such as SiOx, SiNx, SiOxNy and amorphous silicon (a-si: H), etc.

The TL1200 – PECVD system technique to the Swedish Kanthal resistance wire heating element, using double shell structure and 30 program temperature control table, phase-shifting trigger, thyristor control, furnace using polycrystalline alumina fiber material, can stainless steel flange seal on both ends of the furnace tube, stainless steel flange installation have a mouth, valve and pressure gauge, vacuum, vacuum degree can reach 10-3 Pa, low temperature field balancing, surface temperature, lift temperature rate, energy saving, price concessions, etc.

1. Kanthal A1 resistance wire of Sweden

Kanthal A1 Original wire            Chinese resistance wire furnace              VS       Imported resistance wire furnace

(1), high surface temperature can reach 1420 ℃

(2) the surface is stainless steel (very bright, the customer should pay attention to it), it will not rust, and the use time will not fall off the slag.

(3) data of Kanthal resistance wire is downloaded

(4) Kanthal resistance wire website: www.kanthal.com

(5) the resistance is balanced and the temperature field is equally good

Most of the manufacturers use fe-cr-al Alloy doped by Mo resistance wire, which

Sometimes the resistance is uneven and part of the heat is small Kanthal A1 resistance is uniform and heat balanced, good Temperature field effect

2.Installation of air switch and leakage protector:

When an electric current or leakage, an empty meeting automatically disconnects.

3.Can connect with computer

This furnace is equipped with communication interface and software, can be directly through the furnace computer control of each parameter, and can be observed from the computer PV on the stove and SV temperature value and instrument operation, the actual temperature of the furnace curve drawing computer real time, and can keep the temperature data of each time, can call up at any time

4. Chamber 

 (1) High quality high pure alumina polycrystalline fiber cured furnace with vacuum suction and filter molding.

(2). Adopt Japanese technology to form.

(3). The spacing and pitch of the resistance wire in the furnace are arranged according to the best thermal technology of Japan, and the temperature field is simulated by thermal software

 (4). Using 4 weeks heating, the temperature is more balanced

5. optional UL certified electrical board (all through the UL certification of imported electrical appliances)

6. Trigger

Soft-start current limiting trigger                                         Most manufacturers use non-limiting Xiamen Bode triggers

1 phase shift trigger (with soft start and current limiting function)

2 Current limiting function no matter how to adjust the heating time we electric furnace after the transformer secondary current is limited to 170A or less limited protection of the equipment.  Non-limiting trigger if the heating rate is set incorrectly or too fast. Low current current is very large the device will trip or burn out.

3 soft-start function the current will slowly increase the current the impact of the heating element is small is conducive to the extension of the life of the heating element

4 the protection function If the current exceeds the limit current the trigger will automatically cut off the trigger function to cut off the current protection furnac

7.UL certified transformer

1 the transformer cable is pure copper

2 the transformer sound small

3 the transformer temperature is low

8. A variety of options to choose a variety of flanges (diameter from 25 to 250mm)

The instrument has the function of temperature self-setting

(to replace the imported instrument, we need to pay another fee.)

FP93 temperature control table(SHIMADEN)

European instruments  Touchscreen instrumentThe temperature control modePIDBroken even protection and displayYesOver temperature protectionYesOver current protectionYesControl precision+ / – 1 ℃The triggerPhase shift triggerElectrical appliancesZhejiang chintSilicon controlled rectifier106/16e west gate, GermanyThe highest temperatureTemperature Zone1: 1200 ℃ temperature zone 2:1200 ℃The rated temperatureTemperature Zone1: 1100 ℃ temperature zone 2:1100 ℃Heating rateThe 20 ℃ / Min or less (can modify according to the requirement)Recommended heating rate10 ℃ / Min or lessModel of thermocoupleZones 1: temperature range of K type 2: K typeHeating lengthZones 1: temperature range of 200 mm. 2:200 mmElectrical certificationCESurrounding surface temperature45 ℃ or lessRf power supply (plasma generator)Power output range0-500 wMaximum reflected power200 w.Working frequencyRf: 13.56 MHZ plus or minus 0.005%Power stability+ / – 0.1%Harmonic component- 50 or less DBCRf width0-600 – mm is adjustableMatching modeautomaticCooling modeAir coldnoiseThe < 50 dbThe radio frequency interface50 Ω N – typeInput power208-240 – v 50/60 hzMain parameters of GX gas supply systemmass flowmeter
The standard range
Using the proton flow controller 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM
(you can choose the range of the range and the type of the gas)
Maximum working pressure 3 mp
The accuracy of Plus or minus 1.5%
The pressure drop < 0.01 mpa < p = “” >
Repeat accuracy Plus or minus 0.2% F.SChannles:1, 2, 3, 4, 5, 6, 7, 8 (optional )Joint typeDouble cassette stainless steel connectorSystem work pressure range0.1 ~ 0.5 MPaWorking temperature5-45 ℃Pressure vacuum watch0.1 ~ 0.15 MPa to 0.01 MPa/caseStatic mixing chamberDia50 X 400 mminterfaceDia6 1/4″The power supply220 vsize600 x600x600Corrugated pipeKF25X1000mmThe vacuum degree can be reached with this system10-1 the paVacuum baffle valveKF25VRD to 8 vacuum pumpmodelVRD to 8Limiting partial pressure5 x10-2 PaInlet exhaust interfaceKF25Motor speed1440 RPMExtraction rate2.2 L/SMotor power0.4 KWPerfeer ACP1 Oil-free multi-stage roots pump (plan 2)ModelACP15Power supplyAC100 ~ 240V 50/60hzPower450 wExhaust interfaceKF25Weight25 kgThe maximum helium leakage rate is5 · 10-8 Pa m3 / sExtreme vacuum degree0.02 TorrThe extraction rate is14 m3 / hmodelZDR – 1power25 w.Vacuum degree measurement range0.1-10 5 PaResistance siliconWhat ZJ had to 52 tSweden (INFICON) Pirani capacitance vacuum meter (optional)modelPCG554Input voltage24V 1A DC (equipped with 220V transformer)Vacuum gauge interfaceKF16Digital displayDigital display (screen size 20x14mm), whose data display unit is torrProduct size46mm x 28mm x 126mm (L x W x H)The weight of the5 LBSDetection of gasVarious gases can be detected including mixed gases, accurate and repeatable.Whether the anti-corrosionCorrosion protectionThe response time30 ms or lessMeasuring range3.8 x10-5-1125 Torr.Molecular pump unit (optional)Unit input voltage380 v / 220 vCorrugated pipeKF40X1000Vacuum baffle valveKF40Case size600 x600x600Molecular pump
Molecular pump modelFJ620Input voltage380 vMolecular pump inlet flangeDN160Molecular pump pumping rate L/S (for air)600Molecular pump limit pressure (Pa)6 x 10-7Cooling systemWater cooledCooling water pressure (MPa)0.1 to 0.2Cooling water temperature< 25 ℃ < p = “” >The environment temperature0 ~ 40 ℃Suggested starting pressure< 100 pa < p = “” >Engine vacuum pump RVP – 6power0.75 KWvoltage380 vspeed1450 RPMInlet diameterKF25 / KF40Pump pumping rate (L/S)6Ultimate pressure4 x10-2 paGerman Pfeiffer vacuum pumpvoltage220 vpower110 w.Extraction interfaceKF40The weight of the150 kgPump speed of the front pump0.9 m 3 / hExtraction rate (N2)33 m/SCompound vacuum gaugeCompound vacuum gauge modelZDFThe power supply220 v 55 wControl precisionPlus or minus 1%Vacuum gauge measurement range10-5-10 5 P