NST Generator For 50, 80 Or 125 Mm OD Tube Furnace


  • Model Number:NST
  • Compliance:CE Certified
  • Warranty:Two years limited warranty with lifetime technical support
  • Payment:L/C D/A D/P T/T Western Union
  • Delivery Time:15 day

1,269,360.00

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NST power supply

The PECVD system is composed of tube furnace, quartz vacuum chamber, vacuum system, gas supply system and rf power supply system.Mainly used in: metal film, ceramic film, composite film, graphene and other growth.It is easy to increase the function of plasma cleaning etching and etching.The PECVD system has advantages of high deposition rate, good uniformity, consistency and stability.

 

Power output range   0-500W
Maximum reflected power  200W
working frequency RF:13.56MHZ±0.005%
Pw stability +/-0.1%
harmonic component ≤-50dbc
Rf width 0-600mm adjustable
Matching mode  AUTO
Cooling mode air cold
 Noise  <50dB
 RF interface  50Ω   N-type
Input power  208-240V  50/60HZ
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