NST Compact 4″ RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C )
TMAX-1200X-RTP-4-HVis a UL certifiable compact rapid thermal processing tube (4″ I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3″ diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 50 segments precision temperature controller is built in with accuracy +/-1° C.
|Furnace||structure||Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)|
|Heating element||8 pcs Halogen light tube (D=10 L=300 T =200, mm)|
|Working Temp.||1100° C max. (This RTP furnace’s max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )|
|Max heating rate||50° C/sec|
|Max cooling rate||64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)|
|Heating zone||12″ length with 4″ constant temperature zone within +/-1°C uniformity|
|Program Temp. Controller||
|Quartz Tube & Sample Holder||
|Vacuum flange||KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3″ Quartz sample holder.Insert-able thermal-couple for accurate measurement.
|Water Cooling Jacket||
Warning: This RTP furnace’s max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.
|Flow meter||One flow meter is installed on the front panel to adjust gas flow from 0 – 160 ml/min|
|Power input||208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)|
High Vacuum Station
|Vacuum Degree||6.3E-5 mbar (with 4″ RTP tube furnace in 40 minutes)|
Self testing Spinning up
|Start-up time||2 minutes|
|Backing Pump Volume Flow Rate at 10 mbar||3.8 L/min for 50Hz and 4.4 L/min for 60Hz|
|Power input||110V AC or 220V AC switchable, 50/60Hz|
|Power consumption||Duration/Max power: 100/110Watt|
|Shipping Info||Weight and Dimension||RTP furnace: 110 lbs, 760 x 330 x 530mm (30″ x 13″ x 21″ inch) L x W x H
HV station: 40 lbs, 600 x 600 x 700mm (24″ x 24″ x 28″) L x W x H
|Warranty||Two years limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)|
|Laptop, software & WiFi Control (Optional)||