NST-Lab plasma surface treatment instrument

Lab plasma surface treatment instrument combines atmospheric plasma beam together with two dimensions automatic working stage, which allows plasma beam to scan sample surface according to program setting and surface coating or treatment consistent and uniform.




Lab plasma surface treatment instrument consists of RF generator, flexible gas delivery pipe, plasma beam head, the X-Y working stage with vacuum chuck sample holder and programmable control box.The plasma beam can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc, and also  it can make plasma enhanced CVD film on the substrate via mixture chemical gas under atmospheric pressure.

Lab plasma surface treatment instrument specification:

Input Power for Plasma 208 V – 240VAC, 50/60 Hz, < 1000W
RF Generator Output Frequency: 20-23kHz,25KV

Plasma Beam Head: Two plasma beam heads are included: Round head: 10-12mm; Rectangular head: 15-18mm

Input Gas Pressure and Working Gases
  • 40 PSI min.(0.055 Mpa)
  • Air, N2, Ar, He or any mixed gas (no flammable and explosive gases)
Plasma Working Pressure 7- 10 PSI
Working Environmental
  • Temperature: < 42°C
  •  Humidity: ≤ 40℃RH
  •  No flammable gas
Sample Stage & Controller
  • X-Y two dimension are driven by step motors and controlled by SBC control box.
  • Z axis is adjustable by manual
  • Control box has LCD display and scanning program can be set by function key
  • Max. scanning area: 8″×9″
  • One 4″ diameter vacuum chunk is installed on X-Y sample holder, which can soak thin wafer up to 6″ diameter on the sample holder firmly
  • One vacuum pump is included to connect the vacuum chunk
  • The whole system is placed on a heavy duty mobile cart  (600×600×800Lmm)
Dimensions & Net Weight
  • Coating Stage Dimensions: 560mm L×483mm        W×609mm H (Supporting Frame Dimensions: 420mm L×305mm W×457mm H)
  • Plasma Generator Dimensions: 406mm L×508mm  W×230mm H
  • Movement Control Box Dimensions: 330mm L×305mm W×152mm  H
  • Net weight: 55 kg
Warranty & Certificate
  • One year limited warranty with lifetime support
  • CE certified

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