NST-Lab plasma surface treatment instrument

Plasma Beam Head: Two plasma beam heads are included: Round head: 10-12mm; Rectangular head: 15-18mm

• 40 PSI min.(0.055 Mpa)
• Air, N2, Ar, He or any mixed gas (no flammable and explosive gases)

• Temperature: < 42°C
•  Humidity: ≤ 40℃RH
•  No flammable gas

• X-Y two dimension are driven by step motors and controlled by SBC control box.
• Z axis is adjustable by manual
• Control box has LCD display and scanning program can be set by function key
• Max. scanning area: 8″×9″
• One 4″ diameter vacuum chunk is installed on X-Y sample holder, which can soak thin wafer up to 6″ diameter on the sample holder firmly
• One vacuum pump is included to connect the vacuum chunk
• The whole system is placed on a heavy duty mobile cart  (600×600×800Lmm)

• Coating Stage Dimensions: 560mm L×483mm        W×609mm H (Supporting Frame Dimensions: 420mm L×305mm W×457mm H)
• Plasma Generator Dimensions: 406mm L×508mm  W×230mm H
• Movement Control Box Dimensions: 330mm L×305mm W×152mm  H
• Net weight: 55 kg

• One year limited warranty with lifetime support
• CE certified