NST-12 Ion Sputter Coater

Three-target magnetron sputtering coater is equipped with three target guns, one supporting RF power supply for sputter coating of non-conductive targets, and two supporting DC power supplies for sputter coating of conductive materials

Combinatorial plasma sputtering coater has three 2” magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and create various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery).

NST Organic and inorganic evaporation coater is used in the growth of thin-film solar cell, research of ELOEL molecular organic electroluminescent devices thin films. It can be widely used in small amount production and on the scientific research on film materials by universities and research institutes.