NST 1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System
NST -1200PECVD Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.
Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.
All our furnaces are CE compliant.
1 Compact, portable and lightweight design.
2 Lower processing temperatures required compare to conventional CVDs.
3 Film stress can be controlled by high/low frequency mixing techniques.
4 Split furnace chamber for fast and easy tube access.
5 Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
6 Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
7 Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
8 Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.
9 Built-in computer interface.
10 Long life type K thermocouple.
11 Slidable furnace option gives you ultra fast cooling rates
1 Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
2 Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.