This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely
used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process,
there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small
plasma sputtering coater uses manual control system, easy to learn and use. This model machine is also equipped
with a rotatable sample stage, which can effectively improve the uniformity of the coating. The equipment is small in
size and beautiful in appearance, making it the best choice for laboratory coating experiments.
Technical parameters of plasma sputtering coater:
Sample stage | Size | 134mm (OD) with clamps for sample holding |
Rotating speed | 1~60rpm adjustable | |
Plasma sputtering source |
Quantity | 2 inchesx1 |
Cooling method | Natural cooling | |
Vacuum chamber |
Chamber size | φ180mm x 210mm (H) |
Observation window | Omnidirectional visibility | |
Chamber material | High purity quartz | |
Open method | Top cover removable | |
Upper and lower cover material | 304 stainless steel | |
Pumping port | KF16 | |
Inert gas port | 4mm/6mm ferrule connector | |
Power configuration |
Quantity | DC power supplyx1 |
Output power | Max. 150W | |
Sputtering power | 1200V | |
Max. sputtering current | ≤40mA | |
Vacuum system |
Vacuum pump type | Dual-stage rotary vane vacuum pump |
Pumping port | KF16 | |
Exhaust interface | KF16 | |
Pumping rate | 100LPM; 5m3/Hr | |
Ultimate vacuum | 5×10-3 mbar | |
Vacuum measurement | Resistance vacuum gauge (Display on HMI) | |
Targets | All Matellic including: Au, Au/Pd, Au/Pt, Pt, Pt/Pd | Diameter 57mm X 0.1≤5 mm thickness (99.999% Purity)- nos. 1 |
Others |
Power supply | AC 220V 50Hz |
Total power | 1.5kW | |
Dimension | 450mm x 320mm x250mm | |
Weight | 30kg | |
Accessories |
• The equipment will be equipped with an oil mist trap filter for the rotary pump, Vacuum
Hose, Hose Clamps and Power cables. |
|
• Spares kit for three-year operation eg. Pump oil, oil mist filter, O-rings will be supplied
with the equipment |
Documentation |
One set of operating manuals for the equipment and control system will be provided in
hardcopies in English Language |
A soft copy of the above manuals will also be provided in English Language. | |
All the test certificates will be provided | |
Safety Norms | We are ISO 9001:2015 certified company and licensed from BIS for manufacturing of
Industrial, Scientific and medical equipment as per Indian Standard of Emission. |
Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
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