Single-target NST magnetron sputtering coater NST-MSP300S-NST
Single-target NST magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It has the characteristics of miniaturization and standardization. The magnetron target head has 1 inch 2 inches and 3 inches to choose from. Customers can choose the target according to the size of the substrate to be plated.
₹6,100,000.00 ₹6,500,000.00
TECHNICAL MARAMETER
The single-target NST magnetron sputtering coater is equipped with 300W NST power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or NST power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Single-target NST magnetron sputtering coater application:
The device can be used to prepare single-layer ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the single-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for research on solid electrolyte and OLED in the laboratory.
Single-target RF magnetron sputtering coater technical parameters:
| Sample stage | Size | φ185mm | Temperature control accuracy | ±1℃ |
| Heating temperature | Max 500℃ | Rotate speed | 1-20rpm adjustable | |
| Magnetron Sputtering target head | Quantity | 2”×1 (1”,2”,3”optional) | Water chiller | Circulating water chiller with flow rate of 10L/min |
| Cooling mode | Water cooling | |||
| Vacuum chamber | Chamber size | φ300mm×300mm | Watch window | φ100mm |
| Chamber material | Stainless steel | Opening mode | Top cover removable | |
| Mass flow meter | 2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs) | |||
| Vacuum system | Model | NST-GZK103-A | Pumping interface | KF40 |
| Molecular pump | NST-600 | Exhaust interface | KF16 | |
| Backing pump | rotary vane pump | Vacuum measurement | Compound vacuum gauge | |
| Ultimate vacuum | 1.0E-5Pa | Power supply | AC;220V 50/60Hz | |
| Pumping rate | Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes | |||
| Power configuration | Quantity | RF power supply x1 | Max output power | 300W |
| Other parameters | Supply voltage | AC220V,50Hz | Overall size | 600mm×650mm×1280mm |
| Total power | 2KW | Total Weight | 300kg | |
Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.
Based on 0 reviews
Be the first to review “Single-target NST magnetron sputtering coater NST-MSP300S-NST”
Related products
-
Lab thin film Coating Systems, Magnetron Sputter coater
NST-300-2HD dual target magnetron sputtering coater
Lab thin film Coating Systems, Magnetron Sputter coaterNST-300-2HD dual target magnetron sputtering coater
The NST-300-2HD dual target magnetron sputtering coater is equipped with two target guns, one weak magnetic target is used for sputter coating of non-conductive materials and one strong magnetic target is used for sputter coating of ferromagnetic materials.
SKU: n/a -
Lab thin film Coating Systems, Plasma sputtering coater
Small two-in-one coating machine NST-EVS180G-LV
Lab thin film Coating Systems, Plasma sputtering coaterSmall two-in-one coating machine NST-EVS180G-LV
The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.
SKU: 854613298-1-1-1-1-1-2-1-2-1-1-1-1-1-1-1-1-1-1-1-1-1-1-1-1 -
Lab thin film Coating Systems, Magnetron Sputter coater
NST-in-line magnetron sputtering system
NST-in-line magnetron sputtering system is used to deposit metal film (Al, Ag, Ni, Cu, Ti, Pd, etc.) on the surface of crystal silicon, and can realize reactive sputtering. It can complete magnetron sputtering process under high and low vacuum, and also has the ability to produce crystalline silicon photovoltaic film in various sizes and larg.
SKU: n/a -
Lab thin film Coating Systems, Plasma sputtering coater
Three Target Heads Plasma Sputtering Coater NST-PSP180G-3TA
Lab thin film Coating Systems, Plasma sputtering coaterThree Target Heads Plasma Sputtering Coater NST-PSP180G-3TA
Three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. It has the advantages of compact structure, easy to use, high integration and strong sense of design
SKU: 854613298-1-1-1-1-1-2-1-2-1-1-1-1-1-1-1-1-1-1-1-1-1-1-1 -
Lab thin film Coating Systems, Magnetron Sputter coater
NST Programmable single chamber magnetron sputtering coater
Lab thin film Coating Systems, Magnetron Sputter coaterNST Programmable single chamber magnetron sputtering coater
Programmable single chamber magnetron sputtering coater is widely used in semiconductor, LED, photovoltaic and other industries. It is mainly used for the preparation of various metal, semiconductor and dielectric materials thin film, and can meet the needs of scientific research and small batch production.
SKU: n/a
There are no reviews yet.