The single-target NST magnetron sputtering coater is equipped with 300W NST power supply, which can be used for sputtering of non-metal film and optical film. According to the experimental requirements, other specifications of DC or NST power supply can be selected to realize the coating operation of various materials.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Single-target NST magnetron sputtering coater application:
The device can be used to prepare single-layer ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the single-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material films, especially suitable for research on solid electrolyte and OLED in the laboratory.
Single-target RF magnetron sputtering coater technical parameters:
|Sample stage||Size||φ185mm||Temperature control accuracy||±1℃|
|Heating temperature||Max 500℃||Rotate speed||1-20rpm adjustable|
|Magnetron Sputtering target head||Quantity||2”×1 (1”,2”,3”optional)||Water chiller||Circulating water chiller with flow rate of 10L/min|
|Cooling mode||Water cooling|
|Vacuum chamber||Chamber size||φ300mm×300mm||Watch window||φ100mm|
|Chamber material||Stainless steel||Opening mode||Top cover removable|
|Mass flow meter||2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)|
|Vacuum system||Model||NST-GZK103-A||Pumping interface||KF40|
|Molecular pump||NST-600||Exhaust interface||KF16|
|Backing pump||rotary vane pump||Vacuum measurement||Compound vacuum gauge|
|Ultimate vacuum||1.0E-5Pa||Power supply||AC;220V 50/60Hz|
|Pumping rate||Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes|
|Power configuration||Quantity||RF power supply x1||Max output power||300W|
|Other parameters||Supply voltage||AC220V,50Hz||Overall size||600mm×650mm×1280mm|
|Total power||2KW||Total Weight||300kg|
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