TECHNICAL PARAMETER
NST Customized 5 heads NST plasma magnetron sputtering coater is particularly suitable for exploring solid electrolyte materials, combined by 5 different elements in 16 different ratios.This equipment is mainly used to make an oxide film on a single crystal substrate, so there is no need for a high vacuum environment.
NST Customized 5 heads RF plasma magnetron sputtering coater specifications:
Features |
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Input Power |
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Power Source |
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Magnetron Sputtering Head |
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Sputtering Target |
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Vacuum Chamber
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Sample Holder
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Vacuum Pump |
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Net Weight | 60 kg |
Warranty | One years limited warranty with lifetime support |
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