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NST Single chamber magnetron sputtering system

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Single chamber magnetron sputtering system is mainly composed of sputtering vacuum chamber, magnetron sputtering target, substrate water-cooled heating platform, working gas path, air extraction system, vacuum measurement, electronic control system and installation machine.

₹2,350,000.00

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TECHNICAL PARAMETER

Single chamber magnetron sputtering systemĀ is used for the preparation of novel thin film materials such as nanometer single-layer and multi-layer functional film, hard film, metal film, semiconductor film and dielectric film. It can be widely used in the research of thin film materials and the production of small batch. It can be widely used in universities and colleges, scientific research institutes of thin film materials preparation research and small batch.

Single chamber magnetron sputtering system specifications:

Ā Vacuum chamber Circular type vacuum Ā  chamber,

size: Ƙ450Ɨ350mm
Vacuum system configuration Compound Ā  molecular pump, mechanical pump, gate valve
ultimate pressure ā‰¦6.67*10-5Pa(After baking Ā  degassing)
Vacuum Ā  recovery time Up to 6. 6*10-4Pa Ā  in 40 minutes. (the system briefly exposes the atmosphere and fills with dry Ā  nitrogen to start pumping)
Magnetron Ā  target component 3 sets of permanent magnetic targets; target Ā  sizeƘ60mm(one of Ā  the targets can sputtering ferromagnetic material). The RF beach Ā  and DC cutoff of each target are compatible; and the distance between target Ā  and sample is adjustable from 90mm to 100mm; when direct upward sputtering, Ā  the distance between target and samle is adjustable from 40mm to 80mm.
Water-cooling Ā  Substrate Heating Revolution Table Substrate Ā  Structure The substrate Ā  heating and water cooling work independently, and the heating furnace can be Ā  replaced by water cooling substrates
Sample size Ƙ30mm
Mode of motion The substrate Ā  can rotate continuously, and the rotation speed is 5-10 RPM
Heating Max. Ā  Temperature 600ā„ƒĀ±1ā„ƒ
Substrate Ā  Negative Bias -200V
Gas Circuit Ā  System 2-way Mass Ā  Flow Controller(MFC)
Optional parts Ā  6 station base plate heating revolution table Removing the single substrate, The water Ā  heating platform can be replaced on the rotary table. 6 sheets of 30mm Ā  substrates can be placed simultaneously; Among the six stations, one of them Ā  is installed with heating furnace, while the rest are natural cooling Ā  substrates. Maximum temperature of substrate heating: 600ā„ƒĀ±1ā„ƒ
Computer Ā  Control System Control sample Ā  rotation, baffle switch, target identification, etc
Floor Occupied Main Set 1300Ɨ800mm2
Electrical Ā  Cabinet 700Ɨ700mm2

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