Technical Parameter
NST three target heads plasma sputtering coater is a cost-effective plasma sputter coating equipment independently developed by our company. The plasma sputtering target is a standard size of 2 inches. Customers can choose different configurations of 1~3 target heads according to their needs to meet the different experimental needs of single-layer film or multilayer films of various materials. The instrument is equipped with a 150W DC high-voltage power supply, which can be used for metal sputter coating, especially for the coating of metals such as gold, silver and copper. This film coater is equipped with a gas connection for the introduction of protective gas. The instrument adopts touch screen control, which is simple and intuitive to use. It can realize the operation of coating start and stop, switch target head position and baffle rotation with one button, which is very suitable for laboratory purchase.
This film coater is equipped with a two-stage rotary vane vacuum pump. It has the advantages of small volume, quick vacuuming and simple operation. If customers need to further improve the vacuum degree, you can contact the technician to select the molecular pump group to form a high vacuum system.
Two target heads plasma sputtering coater application
It can be used for metal sputter coating, especially for metal coatings such as gold, silver and copper.
Three target heads plasma sputtering coater technical parameters:
Sample stage | Size | Ļ138mm | Temperature control Ā accuracy | ±1ā |
Heating temperature | Max 500ā | Rotate speed | 1-20rpm adjustable | |
DC sputtering target Ā head | Quantity | 2āĆ3 | ||
Vacuum chamber | Chamber size | Ļ180mmĆ150mm | Watch window | Omnidirectional Ā transparent |
Chamber material | High purity quartz | Opening mode | Top cover removable | |
Vacuum system | Mechanical pump | rotary vane pump | Pumping interface | KF16 |
Vacuum measurement | Resistance gauge | Exhaust interface | KF16 | |
Ultimate vacuum | 1.0E-1Pa | Power supply | AC;220V 50/60Hz | |
Pumping rate | rotary vane vacuum pump: 1.1L/S | |||
Power configuration | Quantity | DC power supplyĆ1 | Max output power | 150W |
Other parameters |
Supply voltage | AC220V,50Hz | Overall size | 360mmĆ300mmĆ470mm |
Total power | 800W | Total Weight | 40kg |
Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice
There are no reviews yet.