NST Vacuum Diffusion Pump System
| Diffuser pump unit
|
Unit input voltage | 380V /220V/110V | |
| Bellows | KF40X1000 | ||
| Vacuum flapper valve | KF40 | ||
| Chassis size | 600X600X600 | ||
| Diffusion pump
|
Diffusion pump Model | TK150 | |
| Inlet diameter | 150mm | ||
| Pumping speed rate L/S (for air) | 1000L | ||
| Recommended starting pressure | <10 Pa | ||
| Ultimate pressure (Pa) | 7×10-5 | ||
| Exhaust port flange | KF40 | ||
| Power Rate | 1.2KW | ||
| Input voltage frequency (V/Hz) | 22OV | ||
| Ambient temperature (°C) | 0~40 | ||
| Fore line pump model | FX-16 | ||
| cooling method | Water cooling | ||
| Cooling water temperature (°C) | <25 | ||
| Installation method | Vertical | ||
| Oil filling | 0.3L | ||
| Weight (kg) | 40 | ||
| Product number | FFX-16 | ||
| Diffusion pump pre-stage vacuum pump FFX-16
(The diffusion pump must be equipped with a pre-stage pump)
|
Power Rate | 0.75KW | |
| Voltage | 380V | ||
| Rotating speed | 1450rpm | ||
| Air intake diameter | KF25/KF40 | ||
| Fore line pumping rate (L/S) | 4 | ||
| Ultimate pressure | 4X10 -2Pa | ||
| Composite vacuum gauge
|
Composite vacuum gauge Model | ZDF | |
| Voltage | 220V 55W | ||
| Control accuracy | ± 1% | ||
| Vacuum gauge measurement range | 10-5 -10 5 Pa | ||
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